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Thapar University 2007 M.Tech Electronics and Communication Engineering Microelectronics Technology - Question Paper

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Thapar Institute of Engineering & Technology
M.E. ECE (1st Year)
Final Term exam
CN003 (Microelectronics Technology)

Thapar Institute of Engineering and Technology, Patiala ME- 1st year EC End Semester Examination

Course Code: CN 003

Course name: Microelectronics Technology

Instructor:Ms. Paramjit Kaur

Time Allotted: 3 hours Max Marks:45 Date:13.12.2006


Note: Question 1 is compulsory. Do any 3 Questions From Q-2 to Q-5. Answers should be to the point.

Ql. Discuss

(5*3=15)


a.    LPE

b.    Doping and Autodoping

c.    Thin Film Characteristics

d.    MOCVD

e.    LO-COS

Q2 a. Describe the general classification of Integrated Circuits?

b. Mention the masking properties of Si02.    (2*5=10)

Q3. a. What is EGS and explain the multistep process to obtain EGS?

b. From Ficks First Law of diffusion, drive the Ficks Second Law?

(2*5=10)

Q4 a. The bulk resistivity of nichrome is 120uQ-cm. Calculate the

thickness T in Angstroms of a film with sheet resistivity of 100Q per square, b. Explain the fabrication steps of CMOS?

(2*5=10)

Q5 a. Why seed crystal is used for crystal growth? Explain,

b. What is Plasma Oxidation?

(2*5=10)







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